A novel approach based on simulation of tunable MEMS diaphragm for extrinsic Fabry-Perot sensors

Abstract

A new tunable structure with a Three Leaf Clover (TLC) geometry has been proposed for use in diaphragm-based acoustic pressure sensors. The sensitivity and frequency response of this new structure, which will be an alternative to conventional circular diaphragms, was accomplished using Finite Element Method (FEM) and numerical analysis techniques. As a result of the analysis, sensitivity and frequency response approaches were obtained for the tunable-TLC structure. These approaches provide researchers to design diaphragms more convenient. Conventional circular diaphragms can be easily converted to TLC diaphragms by means of micro-electromechanical systems (MEMS) thus can be tuned up to 5 times for sensitivity and up to 1/3 times the fundamental frequency without altering the thickness and radius of the diaphragm. Obtained approach expressions were compared with FEM results for practical design purposes in a wide range of tunable parameters, and the average errors were below 2.5% for the sensitivity and below 0.5% for the fundamental frequency response, respectively.