Electrical Properties of Polycrystalline SnO2 Thin Films

Abstract

The electrical properties of polycrystalline SnO2 films are investigated by conductivity measurements with respect to the deposition temperature over a temperature range from 60 to 200 K. The electrical conduction is found to be governed by the thermionic emission and tunneling in high temperatures (T > 100 K) and low temperatures (T < 100 K), respectively. (C) 2011 The Japan Society of Applied Physics